Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421977 | Eliminating internal reflections in an interferometric endpoint detection system | Pengyu Han | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421977 | Eliminating internal reflections in an interferometric endpoint detection system | Pengyu Han | 2022-08-23 |