Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450509 | Inductive plasma source with metallic shower head using b-field concentrator | Canfeng Lai, Jeffrey Tobin, Peter I. Porshnev | 2022-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450509 | Inductive plasma source with metallic shower head using b-field concentrator | Canfeng Lai, Jeffrey Tobin, Peter I. Porshnev | 2022-09-20 |