Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538654 | Thermally isolated captive features for ion implantation systems | Adam M. McLaughlin | 2022-12-27 |
| 11239040 | Thermally isolated repeller and electrodes | Adam M. McLaughlin, Craig R. Chaney | 2022-02-01 |
| 11213891 | Semiconductor manufacturing device with embedded fluid conduits | Joshua Abeshaus | 2022-01-04 |