Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11460413 | Apparatus and method for inspecting lamps | Vilen K. NESTOROV | 2022-10-04 |
| 11417561 | Edge ring for a substrate processing chamber | Kadthala Ramaya Narendrnath, Bopanna Ichettira VASANTHA, Simon Yavelberg | 2022-08-16 |
| 11330673 | Heated substrate support | — | 2022-05-10 |