Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521872 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Eli Mor, Sergio Lopez Carbajal | 2022-12-06 |
| 11404296 | Method and apparatus for measuring placement of a substrate on a heater pedestal | Anthony D. Vaughan | 2022-08-02 |
| 11387122 | Method and apparatus for measuring process kit centering | Eli Mor | 2022-07-12 |
| 11342210 | Method and apparatus for measuring wafer movement and placement using vibration data | Terrance Allen Neal | 2022-05-24 |