Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11411168 | Methods of forming group III piezoelectric thin films via sputtering | Jeffrey B. Shealy, Mary Winters | 2022-08-09 |
| 11411169 | Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material | Jeffrey B. Shealy, Mary Winters, Dae Ho Kim, Abhay Saranswarup Kochhar | 2022-08-09 |
| 11355664 | Aluminum nitride substrate removal for ultraviolet light-emitting devices | James R. Grandusky, Leo J. Schowalter | 2022-06-07 |
| 11245382 | Method and structure for single crystal acoustic resonator devices using thermal recrystallization | Shawn R. Gibb, Jeff Leathersich, Steven P. DenBaars, Jeffrey B. Shealy | 2022-02-08 |