Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441223 | Susceptor for a CVD reactor | Oliver Schön, Marcus Schaffrath | 2022-09-13 |
| 11286566 | Apparatus for deposition of a III-V semiconductor layer | Markus Deufel, Marcel KOLLBERG | 2022-03-29 |