Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515123 | Apparatus and system for modulated plasma systems | — | 2022-11-29 |
| 11450510 | Inter-period control system for plasma power delivery system and method of operating same | — | 2022-09-20 |
| 11374565 | System and apparatus with low power pin diode drivers | — | 2022-06-28 |
| 11368163 | Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions | — | 2022-06-21 |
| 11264209 | Application of modulating supplies in a plasma processing system | Kevin Fairbairn, Denis Shaw | 2022-03-01 |