Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538702 | Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same | Sang-Woo Lee | 2022-12-27 |
| 11315764 | Structure variable type of a plasma source coil and a method for controlling the same | Sang-Woo Lee | 2022-04-26 |