Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339474 | Atomic layer deposition apparatus and method for processing substrates using an apparatus | Ernst Hendrik August Granneman | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339474 | Atomic layer deposition apparatus and method for processing substrates using an apparatus | Ernst Hendrik August Granneman | 2022-05-24 |