Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964576 | Electrostatic attachment chuck, method for manufacturing the same, and semiconductor device manufacturing method | Eiichi Yamamoto, Yoshihiro Terakubo, Toshihiro Ito | 2021-03-30 |