Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086055 | Mirror, in particular for a microlithographic projection exposure apparatus or an inspection system | — | 2021-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086055 | Mirror, in particular for a microlithographic projection exposure apparatus or an inspection system | — | 2021-08-10 |