Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10974276 | Hydrophobic shafts for use in process chambers | Ernest E. Allen, Jonathan D. Fischer | 2021-04-13 |
| 10925146 | Ion source chamber with embedded heater | Kevin T. Ryan, Todd Lewis MacEachern, Joseph P. Dzengeleski | 2021-02-16 |