Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10900116 | PVD system with remote arc discharge plasma assisted process | Vladimir Gorokhovsky | 2021-01-26 |
| 10900117 | Plasma corridor for high volume PE-CVD processing | Vladimir Gorokhovsky, Ganesh Kamath, Rudi Koetter | 2021-01-26 |