Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056362 | Wafer heating and holding mechanism and method for rotary table, and wafer rotating and holding device | Osamu Yoshida, Masaki Tamura | 2021-07-06 |
| 10914386 | Method of controlling a gate valve | Tomohiro Sawahata, Katsuyuki Saitoh, Mitsuhiro Ikeda | 2021-02-09 |