Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10914004 | Thin-film deposition method and manufacturing method of semiconductor device | ManSu Lee, SungKyu Kang, Minsoo Kim, SeungWoo Choi | 2021-02-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10914004 | Thin-film deposition method and manufacturing method of semiconductor device | ManSu Lee, SungKyu Kang, Minsoo Kim, SeungWoo Choi | 2021-02-09 |