Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976658 | Sulfonic acid derivative compounds as photoacid generators in resist applications | Yongqiang Zhang, Darin Campo, Martin Kunz | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976658 | Sulfonic acid derivative compounds as photoacid generators in resist applications | Yongqiang Zhang, Darin Campo, Martin Kunz | 2021-04-13 |