Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991591 | Reactive ion etching apparatus | Ryuichiro Kamimura | 2021-04-27 |
| 10950751 | Deep ultraviolet LED and method for manufacturing the same | Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Hideki Hirayama +2 more | 2021-03-16 |