Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910192 | Ion source, ion implantation apparatus, and ion source operating method | Akio Higashi, Toshihiro Terasawa | 2021-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910192 | Ion source, ion implantation apparatus, and ion source operating method | Akio Higashi, Toshihiro Terasawa | 2021-02-02 |