MS

Mauo Sogou

UI Ulvac-Phi, Incorporated: 1 patents #1 of 4Top 25%
Overall (2021): #341,424 of 548,734Top 65%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11145484 Gas cluster ion beam apparatus and analyzing apparatus Hiromichi Yamazui, Daisuke Sakai, Katsumi Watanabe 2021-10-12