Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920331 | Film deposition device of metal film and metal film deposition method | Yuki Sato, Motoki Hiraoka | 2021-02-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920331 | Film deposition device of metal film and metal film deposition method | Yuki Sato, Motoki Hiraoka | 2021-02-16 |