Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978273 | Multiple charged particle beam writing method and apparatus using beams for straddling regions | — | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978273 | Multiple charged particle beam writing method and apparatus using beams for straddling regions | — | 2021-04-13 |