Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11117795 | MEMS vibration element, method of manufacturing MEMS vibration element, and vibration-driven energy harvester | Gen Hashiguchi | 2021-09-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11117795 | MEMS vibration element, method of manufacturing MEMS vibration element, and vibration-driven energy harvester | Gen Hashiguchi | 2021-09-14 |