Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11129267 | Active gas generation apparatus | Ren ARITA | 2021-09-21 |
| 11007497 | Gas jetting apparatus | Yoichiro Tabata, Shinichi Nishimura | 2021-05-18 |
| 10971338 | Active gas generating apparatus | Ren ARITA, Shinichi Nishimura | 2021-04-06 |
| 10927454 | Method of forming nitride film | Shinichi Nishimura, Yoshihito Yamada, Akinobu Teramoto, Tomoyuki Suwa, Yoshinobu Shiba | 2021-02-23 |
| 10889896 | Active gas-generating device and film formation apparatus | Shinichi Nishimura, Yoshihito Yamada | 2021-01-12 |