Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124877 | Film forming device including a detachable bottom plate for forming a film on a substrate | Takahiro Shirahata | 2021-09-21 |
| 11075318 | Buffer layer film-forming method and buffer layer | Takahiro Shirahata, Takahiro Hiramatsu, Hiroshi Kobayashi | 2021-07-27 |