Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171020 | Substrate treatment apparatus | Satoshi NAKAOKA, Katsuhiro Sato, Hiroaki ASHIDATE, Yuji Hashimoto | 2021-11-09 |
| 10910236 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Hiroaki Yamada, Yuji Hashimoto | 2021-02-02 |