Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204551 | Resist composition and method for forming resist pattern | Issei Suzuki, Yuki FUKUMURA, Toshikazu Takayama, Takashi Kamizono, Tatsuya Fujii | 2021-12-21 |
| 11187981 | Resist composition and method of forming resist pattern | Yoichi Hori, Yasuhiro Yoshii, Hitoshi Yamano, Takahiro Kojima | 2021-11-30 |
| 10976661 | Resist composition, method of forming resist pattern, and polymer compound | Hiroto Yamazaki, Kenta Suzuki | 2021-04-13 |