Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062904 | Method of forming polysilicon film and film forming apparatus | Atsushi Endo | 2021-07-13 |
| 10957535 | Semiconductor film forming method and film forming apparatus | Younggi HONG | 2021-03-23 |