Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079679 | Substrate processing method and recording medium capable of suppressing non-uniformity in degree of progression of processing depending on position on substrate | Takeshi Shimoaoki, Masahiro Fukuda, Kouichirou Tanaka | 2021-08-03 |