Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11141758 | Film forming method, storage medium, and film forming system | Kentaro Yoshihara, Naoki Shibata, Kousuke Yoshihara | 2021-10-12 |
| 11063009 | Semiconductor device | Kenji Sakata, Toshihiko Akiba, Takuo Funaya, Hideaki Tsuchiya | 2021-07-13 |
| 10974181 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Ryouichirou Naitou, Arnaud Alain Jean DAUENDORFFER, Koji Takayanagi, Shinobu Miyazaki | 2021-04-13 |