Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056317 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2021-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056317 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2021-07-06 |