TH

Tsutomu Hiroki

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #102,849 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11139185 Substrate processing device and substrate transfer method — 2021-10-05
11004664 Heat transfer medium supply system and substrate processing apparatus — 2021-05-11