Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139147 | Plasma processing apparatus | Takaaki Kato | 2021-10-05 |
| 10991549 | Antenna and plasma deposition apparatus | Taro Ikeda | 2021-04-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139147 | Plasma processing apparatus | Takaaki Kato | 2021-10-05 |
| 10991549 | Antenna and plasma deposition apparatus | Taro Ikeda | 2021-04-27 |