TT

Teppei Takahashi

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #106,082 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11036138 Substrate processing apparatus, substrate processing method, and computer-readable recording medium — 2021-06-15
10926288 Coating method, coating apparatus and recording medium — 2021-02-23