TM

Tatsuya MIYAHARA

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
📍 Yamanashi, JP: #151 of 405 inventorsTop 40%
Overall (2021): #241,211 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10892162 Silicon film forming method and substrate processing apparatus Mitsuhiro Okada, Keisuke Fujita 2021-01-12