TU

Takuya UMISE

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #239,003 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11189514 Substrate processing apparatus and substrate transfer method — 2021-11-30