Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087983 | Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium | Eiichi Sekimoto, Hiroshi Seko | 2021-08-10 |
| 10886151 | Heating apparatus and substrate processing apparatus | Kenichi Shigetomi, Takayuki Fukudome | 2021-01-05 |