Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201038 | Support assembly and support assembly assembling method | — | 2021-12-14 |
| 11201039 | Mounting apparatus for object to be processed and processing apparatus | — | 2021-12-14 |
| 11175321 | Semiconductor device | — | 2021-11-16 |
| 11121010 | Plasma processing apparatus | — | 2021-09-14 |
| 11037767 | Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support | — | 2021-06-15 |
| 10968925 | Gas cylinder | Takeshi Akao | 2021-04-06 |