Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978275 | Manufacturing method of showerhead for plasma processing apparatus | Yoshitaka Tamura | 2021-04-13 |
| D911985 | Gas introduction plate for plasma etching apparatus for etching semiconductor wafer | Yoshitaka Tamura | 2021-03-02 |