Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041239 | Film forming method for SiC film | Shuji AZUMO, Yusaku Kashiwagi | 2021-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041239 | Film forming method for SiC film | Shuji AZUMO, Yusaku Kashiwagi | 2021-06-22 |