SS

Shinichiro Shimomura

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #260,300 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11183396 Substrate processing method and substrate processing apparatus 2021-11-23