Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201068 | Heat treatment apparatus, method of managing heat treatment apparatus and storage medium | Junnosuke Maki | 2021-12-14 |
| 11142823 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2021-10-12 |