Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152196 | Substrate processing apparatus | — | 2021-10-19 |
| 10910251 | Pin control method and substrate processing apparatus | Masato Horiguchi | 2021-02-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152196 | Substrate processing apparatus | — | 2021-10-19 |
| 10910251 | Pin control method and substrate processing apparatus | Masato Horiguchi | 2021-02-02 |