ST

Satoshi Taga

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #272,065 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10941477 Substrate processing apparatus and susceptor Yoshiyuki Kobayashi 2021-03-09