Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114297 | Method for forming semiconductor film and film forming device | Keita Kumagai, Keisuke Fujita | 2021-09-07 |
| 11101131 | Film forming method and film forming apparatus | Hiroyuki Hayashi | 2021-08-24 |