Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982335 | Wet atomic layer etching using self-limiting and solubility-limited reactions | — | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982335 | Wet atomic layer etching using self-limiting and solubility-limited reactions | — | 2021-04-20 |