Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Toshio Hasegawa, Tamaki Takeyama, Shinya Iwashita, Katsuhito Hirose | 2021-08-03 |