Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120985 | Substrate transfer device, substrate processing system, substrate processing method and computer-readable recording medium | — | 2021-09-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120985 | Substrate transfer device, substrate processing system, substrate processing method and computer-readable recording medium | — | 2021-09-14 |