Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978322 | Transfer device, substrate processing apparatus, and transfer method | Ao ZHENG, Koyu Hasegawa | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978322 | Transfer device, substrate processing apparatus, and transfer method | Ao ZHENG, Koyu Hasegawa | 2021-04-13 |