Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968513 | Plasma film-forming apparatus and substrate pedestal | Toshio Nakanishi, Minoru Honda, Koji Kotani | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968513 | Plasma film-forming apparatus and substrate pedestal | Toshio Nakanishi, Minoru Honda, Koji Kotani | 2021-04-06 |